Measurement of Microdeformation by Transparent-Type Diffraction Moire Interferometry Using Light Control Plate

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Moire interferometry is a method of measuring submicron displacement distribution using two or four collimated beams incident to a specimen diffraction grating. In this paper, in order to form these two or four beams, a transparent diffraction grating is used. Two types of transparent diffraction moire interferometry are developed. One uses oblique incident beams for measuring one-dimensional displacement. The other uses normal incident beams for measuring one- or two-dimensional displacement components. In the latter, the 0th-order diffraction beam is noise. This noise is removed using light control plates which were developed recently. By using this diffraction moire interferometry, a compact system for microdeformation measurement is developed.

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詳細情報 詳細情報について

  • CRID
    1571698602110945920
  • NII論文ID
    110002964256
  • NII書誌ID
    AA10888746
  • ISSN
    09148809
  • 本文言語コード
    en
  • データソース種別
    • CiNii Articles

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