Surface potential investigations of field emitter materials by scanning Maxwell stress microscopy.

• Nazuka Yutaro

  Tokai University

• Yasumuro Chiaki

  Tokai University

• Inoue Takahito

  Electrotechical Laboratry

• Yokoyama Hiroshi

  Electrotechical Laboratry

• Hirano Takayuki

  KOBE Steel

• Kanemaru Seigo

  Electrotechical Laboratry

• Itoh Junji

  Electrotechical Laboratry

Bibliographic Information

Other Title

• 走査型マクスウェル応力顕微鏡を用いたエミッタ材料の評価

Abstract

The scanning Maxwell-stress microscope(SMM)is a type of non- cotact scanning force microscopes.That is capable of imaging the surface potential and topograph with manometer spacial resolution at the same time.In order to improve the emission properties of field emitter arrays,we should investigate and cotrol the surface conditions of the emitter materials.For this purpose,we have measured surface potentials of various emitter materials such as Al,Mo,Nb,with SMM technique.In this paper,principle of SMM and etperimental results are described in detail.

Journal

• IEICE technical report. Electron devices

  IEICE technical report. Electron devices 94 (404), 39-44, 1994-12-15

  The Institute of Electronics, Information and Communication Engineers

Keywords

• scanning Maxwellstress microscopy
• SMM
• Field emitter
• Surface potential
• Cantilever
• Work function

Details

• CRID: 1571698602309878784
• NII Article ID: 110003200815
• NII Book ID: AN10012954
• Text Lang: ja
• Data Source:
  • CiNii Articles