Dry-Released Nickel Micromotors with Low-Friction Bearing Structure

• HIRANO Toshiki

  IBM Research, Tokyo Research Laboratory

• FURUHATA Tomotake

  IBM Research, Tokyo Research Laboratory

• FUJITA Hiroyuki

  the Institute of Industrial Science, The University of Tokyo

抄録

A new electrostatic wobble motor design and fabrication method were proposed, and micromotors were successfully fabricated and operated. The advantages are (1) thicker structural size, resulting in larger torque, (2) simple and safe fabrication process and (3) needle-shaped bearing to support the rotor. Needle-shaped bearing used here is expected to have lower friction comparing with the existing motor, since the load is smaller for this kind of bearing structure. Two major sources of the load, electrostatic force and capillary force, were considered to prove this tendency. Diamond-like Carbon (DLC) film was employed as a solid lubricant for its bearing. The friction of DLC and that of ilicon-dioxide were compared by experiment.

収録刊行物

• IEICE transactions on electronics

  IEICE transactions on electronics 78 (2), 132-138, 1995-02-25

  一般社団法人電子情報通信学会

キーワード

• micromotor
• electroplating
• friction
• diamond-like carbon

詳細情報

• CRID: 1573105977302168576
• NII論文ID: 110003210821
• NII書誌ID: AA10826283
• ISSN: 09168524
• 本文言語コード: en
• データソース種別:
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