Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films

• HONDA Takashi

  Institute of Electrical Communication, Tohoku University

• ARAI Ken Ichi

  Institute of Electrical Communication, Tohoku University

• YAMAGUCHI Masahiro

  Institute of Electrical Communication, Tohoku University

抄録

A new magnetostrictive thin-film cantilever actuator and a new thin-film walking mechanism were developed. The actuators were made of magnetostrictive amorphous Tb-Fe and Sm-Fe thin films, deposited on the opposite sides of a polyimide film substrate. These actuators need not power supply cables because they were remotely driven by external magnetic fields. The static deflection of a 3-mm-long cantilever actuator was as large as 100μm at 300 Oe field. Moreover the application of ac resonant frequency field of the same intensity yielded deflection of above 500μm. The walking mechanism ran as fast as in the order of cm/s. The forward and backward running were possible depending on the frequency of applied magnetic field. Such unique characteristics suggest that magnetostrictive thin-film actuators are useful in MEMS applications.

収録刊行物

• IEICE transactions on electronics

  IEICE transactions on electronics 80 (2), 232-238, 1997-02-25

  一般社団法人電子情報通信学会

キーワード

• magnetostriction
• Tb-Fe thin film
• Sm-Fe thin film
• wireless remote operation
• cantilever
• walking mechanism

詳細情報

• CRID: 1573950402232511872
• NII論文ID: 110003211191
• NII書誌ID: AA10826283
• ISSN: 09168524
• 本文言語コード: en
• データソース種別:
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