High Efficiency 400dpi AlGaAs LED Array Fabrication for PMS (Polygon Mirror Scanning)

  • KIM In Hoe
    Korea Electronics Technology Institute, Electronics Devices Research Center
  • PARK Kwang Bum
    Korea Electronics Technology Institute, Electronics Devices Research Center
  • MOON Hyun Chan
    Korea Electronics Technology Institute, Electronics Devices Research Center

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抄録

PMS is consist of LED array, lens, polygon-mirror, and motor. A PMS's light sources is the linear LED array. We have fabricated 400dpi LED array using GaAs/AlGaAs (A1〜0.65) single heterojunction structure. The problem of AlGaAs LED array is among the emitters. Thus, we have performed isolation bv RIE (Reactive Ion Etching) and wet etching. RIE experiments were carried out at room temperature and used in mixture of gases under a variety of etching conditions. The n and p ohmic contacts were made with AuGe/Ni/Au and AuZn/Pd/Au, respectively. The AlGaAs LED array showed good quality with low forward turn-on voltages and high brightness.

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詳細情報 詳細情報について

  • CRID
    1571698602344903680
  • NII論文ID
    110003269308
  • NII書誌ID
    AN10060775
  • 本文言語コード
    en
  • データソース種別
    • CiNii Articles

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