Formation of Droplets on Thin Film Surface in Pulsed Laser Deposition Using Metal Targets

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Abstract

The relationship between the morphology of Au, Cu and Ag metal targets and the formation of droplets on the metal thin films was investigated using the Pulsed Laser Deposition (PLD). The metal thin films were made from the metal targets by irradiating KrF excimer laser at various laser fluences from 2. 5 J/cm<sup>2</sup> to 10 J/cm<sup>2</sup> in a vacuum chamber. The surface morphology of the target after laser irradiation was observed by a Scanning Electron Microscope (SEM). It was found that spouting holes occurred on the surface of the Cu target after laser irradiation at the laser fluence of 10 J/cm<sup>2</sup>. Droplets of about 1 (m in diameter were found around the spouting holes. Oxygen, Phosphor and Sulphur were detected at the spouting holes from Energy Dispersive X-Ray (EDX) analyses. However, at the laser fluence of 2. 5 J/cm<sup>2</sup> spouting holes were not found. The observation on the surface of metal thin film indicates that particles of about 1 μm in diameter fly out away from the target and then reach on the surface of substrate with high velocity as droplets. The same phenomenon was observed when Ag and Au targets were used. In the case where a high purity of Cu (111) single crystal target was used, it was obvious that the surface morphology of the target after laser irradiation would be good enough at the central zone subjected to the laser irradiation of higher laser energy than at the circumference zone.<br>

Journal

  • QUARTERLY JOURNAL OF THE JAPAN WELDING SOCIETY

    QUARTERLY JOURNAL OF THE JAPAN WELDING SOCIETY 21(3), 338-343, 2003-08-05

    Japan Welding Society

References:  8

  • <no title>

    CRISEY D. B. Eds.

    Pulsed Laser Deposition of Thin-Films, 1997

    Cited by (1)

  • <no title>

    MILLER J. C.

    Laser Ablation Mechanism and Applications, 1994

    Cited by (1)

  • <no title>

    SZORENYI T.

    Applied Surface Science 327, 109, 1997

    Cited by (1)

  • <no title>

    REBOUILLAT J. P.

    Mater. Res. Soc. Proc. 151, 259, 1989

    Cited by (1)

  • <no title>

    GAPONOV S. V.

    Sov. Phys. Tech. Phys. 26, 598, 1981

    Cited by (1)

  • <no title>

    GAPONOV S. V.

    Sov. Phys. Tech. Phys. 38, 7, 1981

    Cited by (1)

  • <no title>

    BARR W. P.

    J. Phys. E2, 2, 1969

    Cited by (1)

  • <no title>

    VAN DE RIET E.

    J. Appl. Phys. 74, 2008, 1993

    Cited by (3)

Codes

  • NII Article ID (NAID)
    110003422355
  • NII NACSIS-CAT ID (NCID)
    AN1005067X
  • Text Lang
    ENG
  • Article Type
    SHO
  • ISSN
    02884771
  • NDL Article ID
    6674639
  • NDL Source Classification
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL Call No.
    Z17-939
  • Data Source
    CJP  NDL  NII-ELS  J-STAGE 
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