マイクロプラズマの計測・解析  [in Japanese] Diagnostics and Simulations of Microplasmas  [in Japanese]

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Author(s)

Abstract

Properties of microplasmas can be characterized not only by their small sizes from mm to μm but also by their relatively high plasma densities which range over 10<sup>13</sup> cm<sup>-3</sup> in collision dominant atmospheres. These features are due to the high operating pressure generally used, in accordance with Paschen’s law. In addition, the plasma-wall interaction becomes important, given that the charges accumulated on the surface can strongly affect the discharge and plasma behaviors. Diagnostics and simulations should aim to clarify those specific properties of microplasmas. Although there are many difficulties inherent in measurements in such small spaces, several methods have been developed by using optical absorption, fluorescence, and scattering techniques by using various lasers as the light sources. For the simulation, in most cases fluid, particle and Vlasov models can be applied to microplasmas operating at higher pressure. The computer simulations are performed to investigate and produced microplasmas. In this chapter, an overview of our studies on the diagnostics and simulations, mentioned above, will be introduced.

Journal

  • Journal of Plasma and Fusion Research

    Journal of Plasma and Fusion Research 80(10), 835-844, 2004-10-25

    The Japan Society of Plasma Science and Nuclear Fusion Research

References:  28

Codes

  • NII Article ID (NAID)
    110003827864
  • NII NACSIS-CAT ID (NCID)
    AN10401672
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    09187928
  • NDL Article ID
    7137802
  • NDL Source Classification
    ZM35(科学技術--物理学)
  • NDL Call No.
    Z15-8
  • Data Source
    CJP  NDL  NII-ELS  J-STAGE  NDL-Digital 
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