Continuous Ellipsometric Determination of the Optical Constants and Thickness of a Silver Film during Deposition

• Yamaguchi Tomuo

  Department of Applied Physics, Faculty of Engineering, University of Tokyo

• Yoshida Sadafumi

  Department of Applied Physics, Faculty of Engineering, University of Tokyo

• Kinbara Akira

  Department of Applied Physics, Faculty of Engineering, University of Tokyo

抄録

A method for obtaining the optical constants and thickness of thin metal films during deposition using an automatic recording ellipsometer is described. The restored azimuth Ψ, the differential phase change on reflection Δ and the transmittance T have been continuously meaured during the film deposition. The optical constants and the packing factor are calculated from these three quantities and are given as functions of film thickness for various deposition conditions.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 8 (5), 559-567, 1969

  The Japan Society of Applied Physics

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1390001206269765248
• NII論文ID: 110003898384
• NII論文ID: 130003475370
• NII論文ID: 210000074271
• NII書誌ID: AA00690800
• DOI: 10.1143/jjap.8.559
• COI: 1:CAS:528:DyaF1MXktFKmsbY%3D
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.8.559
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.8.559/pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可