Microwave Ion Source Using Resonant Cavity

• Tahara Hirokazu

  Department of Mechanical Engineering, Faculty of Engineering Science, Osaka University

• Yasui Toshiaki

  Department of Mechanical Engineering, Faculty of Engineering Science, Osaka University

• Onoe Ken-ichi

  Department of Mechanical Engineering, Faculty of Engineering Science, Osaka University

• Tsubakishita Yasuji

  Department of Mechanical Engineering, Faculty of Engineering Science, Osaka University

• Yoshikawa Takao

  Department of Mechanical Engineering, Faculty of Engineering Science, Osaka University

抄録

Ring-cusped magnetic-field ion sources using 2.45-GHz-microwave resonant cavities were studied to develop high-performance compact ion sources for economically assisting material processings. The minimum flow rate required to sustain discharge was 10 sccm for weak-B-field off-resonance discharge in the TM₀₁₁-mode-excitation cylindrical cavity, 6 sccm for weak-B-field discharge in the reentrant coaxial cavity, in which a stronger electric field was generated compared with that in the cylindrical cavity, and 3 sccm for electron cyclotron resonance (ECR) discharge in the cylindrical cavity. As a result of ion beam extraction, the highest mass utilization efficiency of 18.7% was achieved for ECR discharge.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 32 (3), 1298-1302, 1993

  社団法人応用物理学会

キーワード

• microwave ion source
• cylindrical resonant cavity
• reentrant coaxial resonant cavity
• weak ring-cusped magnetic field
• off-resonance discharge
• electron cyclotron resonance discharge
• electric field measurement
• ion beam extraction experiment

詳細情報

• CRID: 1572543027260493696
• NII論文ID: 110003899424
• NII書誌ID: AA10457675
• 本文言語コード: en
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