Quantitative Analysis of Trace Water in Highly Puified Nitrogen Gas by Atmospheric Pressure Ionization Mass Spectrometer

• MITSUI Yasuhiro

  Semiconductor & Integrated Circuits Div., Hitachi Ltd.

• IRIE Takashi

  Central Research Laboratoly, Hitachi Ltd.

• MIZOKAMI Kazuaki

  EED, Hitachi tokyo Electronics Co., Ltd.

• KURIYAMA Katsumi

  EED, Hitachi tokyo Electronics Co., Ltd.

• NAKANO Kazuo

  EED, Hitachi tokyo Electronics Co., Ltd.

• NAKAMURA Yuko

  EED, Hitachi tokyo Electronics Co., Ltd.

収録刊行物

• Japanese journal of applied physics. Pt. 1, Regular papers & short notes

  Japanese journal of applied physics. Pt. 1, Regular papers & short notes 34 (9), 4991-4996, 1995-09-01

  社団法人応用物理学会

キーワード

• atmospheric pressure ionization mass spectrometer
• calibration curve
• nitrogen gas
• trace water
• ppm
• ppb
• ppt

詳細情報

• CRID: 1570291227433963136
• NII論文ID: 110003904622
• NII書誌ID: AA10457675
• ISSN: 00214922
• 本文言語コード: en
• データソース種別:
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