A New Pulsed Laser Deposition Method Using an Aperture Plate.

  • Inoue Narumi
    Department of Electrical Engineering, National Defense Academy, 1–10–20 Hashirimizu, Yokosuka 239, Japan
  • Ozaki Tatsuya
    Department of Electrical Engineering, National Defense Academy, 1–10–20 Hashirimizu, Yokosuka 239, Japan
  • Monnaka Toshiaki
    Department of Electrical Engineering, National Defense Academy, 1–10–20 Hashirimizu, Yokosuka 239, Japan
  • Kashiwabara Shigeru
    Department of Electrical Engineering, National Defense Academy, 1–10–20 Hashirimizu, Yokosuka 239, Japan
  • Fujimoto Ryozo
    Department of Electrical Engineering, Nippon Bunri University, 1727–162 Ichiki, Tao, Oita 870–01, Japan

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タイトル別名
  • New Pulsed Laser Deposition Method Usin

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A new off-axis pulsed laser deposition method using an aperture plate is proposed for the purpose of depositing high surface-quality Ta2O5 thin films without large fragments and/or droplets. The angular distribution of droplets and growth species emitted from the target is examined. Then, the oxygen pressure and laser energy dependencies of the number of droplets and the film thickness are also examined. The results indicate that the aperture plate plays an important role of limiting the path of the traveling droplets and of capturing the droplets traveling toward the off-axis substrate. On the other hand, the film deposition rate is not slow even when using the plate because the species pass through the aperture hole and reach the substrate by scattering. Using a 5 mm aperture plate, a good surface quality Ta2O5 film is obtained under the optimum condition of 200-300 mTorr oxygen pressure.

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