Evaluation of Electrical Properties of Evaporated Thin Films of Metal-Free, Copper and Lead Phthalocyanines by In-Situ Field Effect Measurements.

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  • Kudo Kazuhiro
    Department of Electrical and Electronics Engineering, Faculty of Engineering, Chiba University, 1–33 Yayoi–cho, Inage–ku, Chiba 263, Japan
  • Sumimoto Tsutomu
    Department of Electrical and Electronics Engineering, Faculty of Engineering, Chiba University, 1–33 Yayoi–cho, Inage–ku, Chiba 263, Japan
  • Hiraga Kouji
    Department of Electrical and Electronics Engineering, Faculty of Engineering, Chiba University, 1–33 Yayoi–cho, Inage–ku, Chiba 263, Japan
  • Kuniyoshi Shigekazu
    Department of Electrical and Electronics Engineering, Faculty of Engineering, Chiba University, 1–33 Yayoi–cho, Inage–ku, Chiba 263, Japan
  • Tanaka Kuniaki
    Department of Electrical and Electronics Engineering, Faculty of Engineering, Chiba University, 1–33 Yayoi–cho, Inage–ku, Chiba 263, Japan

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  • Evaluation of Electrical Properties of

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We have fabricated thin-film transistors consisting of evaporated thin films of metal-free, copper and lead phthalocyanines, and estimated the electrical parameters of carrier mobility, carrier concentration and electrical conductivity by in-situ field effect measurements. We have also investigated the effect of introducing of oxygen gas into the vacuum chamber and of thermal annealing on the electrical parameters of the films. We found that the carrier concentration and carrier mobility are strongly influenced by the metals in the phthalocyanine molecules and by oxygen gas exposure.

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