Lamellar and Grain Boundary Models for the Electrical Properties of Post-Oxidized ITO Films

• Mizuhashi Mamoru

  Research Laboratory, Asahi Glass Co. Ltd.

抄録

A very distinctive feature of the resistivity change during the course of heat treatment in air and a rather weak dependence on the impurity concentration are described on the basis of the diffusion of oxygen and the formation of highly resistive grain boundary.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 22 (4), 615-620, 1983

  社団法人応用物理学会

詳細情報

• CRID: 1573105977200302592
• NII論文ID: 110003909709
• NII書誌ID: AA10457675
• 本文言語コード: en
• データソース種別:
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