Estimation of Low-Energy Ion Bombardment Damage on GaAs(001) Surface by X-Ray Photoelectron Diffraction
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- Sekino Yuko
- Institute of Industrial Science, University of Tokyo
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- Owari Masanori
- Institute of Industrial Science, University of Tokyo
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- Kudo Masahiro
- Institute of Industrial Science, University of Tokyo
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- Nihei Yoshimasa
- Institute of Industrial Science, University of Tokyo
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The structural damage on a GaAs (001) surface was estimated by means of X-ray photoelectron diffraction (XPED), which was induced by 170–1200 eV ion bombardment at various polar angles of ion-incidence. The thickness of the damage, which was saturated at a sufficiently high ion dosage, was obtained using a ‘homogeneous two-layer model’. The saturation thickness, which varied from 4 to 36 Å, decreased as the ion acceleration voltage decreased and the polar angle of ion incidence increased. In the state before saturation, a ‘mosaic two-layer model’ was applied, and the results indicated that the initial rate of the damage formation of the ion bombardment depended on the ion acceleration voltage and the angle of ion-incidence. The ‘displacement yield’, i.e., the number of displaced atoms produced by one ion, was obtained.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 25 (4), 538-543, 1986
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詳細情報 詳細情報について
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- CRID
- 1570291227429176192
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- NII論文ID
- 110003910824
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- NII書誌ID
- AA10457675
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- 本文言語コード
- en
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- データソース種別
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