Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets

• Shida Noriyoshi

  Department of Electrical and Electronics Engineering, Faculty of Engineering, Toyo University

• Inoue Takashi

  Department of Electrical and Electronics Engineering, Faculty of Engineering, Toyo University

• Kokai Hideki

  Department of Electrical and Electronics Engineering, Faculty of Engineering, Toyo University

• Sakamoto Yuichi

  Nichimen Electronic Technology Corporation

• Miyazawa Wataru

  Research and Development Laboratory, Irie Koken Co., Ltd.

• Den Shoji

  Research and Development Laboratory, Irie Koken Co., Ltd.

• Hayashi Yuzo

  Research and Development Laboratory, Irie Koken Co., Ltd.

抄録

A large-area electron cyclotron resonance (ECR) plasma is generated by using permanent magnets and applying the whistler-mode launching of microwaves. A uniform plasma is produced with the uniformity of ±3.5% over 20 cm and ±1.8% over 16 cm in diameter; the plasma space potential is about 17 V with the uniformity of ±1% over 20 cm. The maximum ion current density is about 11.5 mA·cm⁻². The purity of the produced plasma is high. No damage was found after the operation for 100 h with the microwave power of 600 W.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 32 (11), L1635-L1637, 1993

  社団法人応用物理学会

キーワード

• ECR
• permanent magnets
• grad B drift
• curvature drift
• slotted array antenna
• whistler-mode launching

詳細情報

• CRID: 1573105977151022848
• NII論文ID: 110003924748
• NII書誌ID: AA10457675
• 本文言語コード: en
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