Thermodynamic Analysis of In_xGa_<1-x>N Alloy Composition Grown by Metalorganic Vapor Phase Epitaxy

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Abstract

A thermodynamic analysis of alloy composition is described for metalorganic vapor phase epitaxy (MOVPE) of In<SUB> x</SUB>Ga<SUB>1- x</SUB>N. The vapor-solid distribution relationship is discussed in comparison with the experimental data reported in the literature. It is shown that the solid composition of In<SUB> x</SUB>Ga<SUB>1- x</SUB>N alloy grown by MOVPE is thermodynamically controlled. The origin of the deviation of the solid composition from the linear relation is also discussed.

Journal

  • Japanese Journal of Applied Physics

    Japanese Journal of Applied Physics 35(6), L673-L675, 1996-06-01

    The Japan Society of Applied Physics

References:  11

Cited by:  1

Codes

  • NII Article ID (NAID)
    110003925134
  • NII NACSIS-CAT ID (NCID)
    AA10650595
  • Text Lang
    ENG
  • Article Type
    Journal Article
  • Journal Type
    大学紀要
  • ISSN
    00214922
  • NDL Article ID
    4059852
  • NDL Source Classification
    ZM35(科学技術--物理学)
  • NDL Call No.
    Z54-J337
  • Data Source
    CJP  CJPref  NDL  NII-ELS  J-STAGE 
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