Feasibility Study on a Novel Type of Computerized Tomography Based on Scanning Probe Microscope.

• Ohta Takayuki

  Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamadaoka, Suita, Osaka 565, Japan

• Sugawara Yasuhiro

  Department of Physics, Faculty of Science, Hiroshima University, 1–3–1 Kagamiyama, Higashi–Hiroshima, Hiroshima 739, Japan

• Morita Seizo

  Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamadaoka, Suita, Osaka 565, Japan

書誌事項

タイトル別名

• Feasibility Study on a Novel Type of Co

抄録

A novel type of computerized tomography (CT) using a scanning probe microscope (SPM) was proposed. For an electrostatic force microscope (EFM) which is a kind of SPM, electrostatic force data was processed using CT to reconstruct the electric charge distribution in the sample. The conjugate gradient method (CGM) was used for the charge reconstruction. The result of computer simulation shows that it is possible to reconstruct the electric charge distribution in the sample from the electrostatic force distribution measured by EFM. In the same way, it will be feasible to reconstruct the inner structure of samples from other SPM data.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 35 (9B), L1222-L1224, 1996

  The Japan Society of Applied Physics

キーワード

• computerized tomography
• scanning probe microscope
• electrostatic force microscope
• charge distribution
• conjugate gradient method

詳細情報

• CRID: 1390282681226891264
• NII論文ID: 210000040264
• NII論文ID: 110003925297
• NII書誌ID: AA10650595
• DOI: 10.1143/jjap.35.l1222
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 4060313
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4060313
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.L1222
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.L1222/pdf
• 本文言語コード: en
• データソース種別:
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