Fabrication of Si Field Emitter Tip for Three-Dimensional Vacuum Magnetic Sensor

• Uemura Koji

  Tsukuba Laboratory, Yaskawa Electric Co., Ltd., 5–9–10 Tohkohdai, Tsukuba–shi, Ibaraki 300–26, Japan

• Kanemaru Seigo

  Electrotechnical Laboratory, 1–1–4 Umezono, Tsukuba–shi, Ibaraki 305, Japan

• Itoh Junji

  Electrotechnical Laboratory, 1–1–4 Umezono, Tsukuba–shi, Ibaraki 305, Japan

書誌事項

タイトル別名

• Fabrication of Si Field Emitter Tip for a Three-Dimensional Vacuum Magnetic Sensor.

抄録

A new Si field emitter tip generating a cross-shaped electron beam was fabricated for a three-dimensional vacuum magnetic sensor (VMS) application. The present tip is surrounded by a gate for field emission, and a focusing lens is made in the same plane as the gate. The beam current of about 50 nA was obtained with a single tip at the gate and lens voltages of 55 V and 10 V, respectively. The fabrication process and beam characteristics are described. Preliminary results such as linearity and sensitivity of VMS using the present tip are also discussed.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 35 (12B), 6629-6631, 1996

  The Japan Society of Applied Physics

キーワード

• vacuum magnetic sensor
• vacuum microelectronics
• field emitter
• three dimensions
• cross-shaped electron beam
• focus lens
• Lorentz force

詳細情報

• CRID: 1390001206250269056
• NII論文ID: 210000040105
• NII論文ID: 110003955333
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.35.6629
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 4639274
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4639274
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.6629
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.6629/pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可