Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method.

• Lebedev Maxim

  \Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan JST cooperative researcher, 4-1-8 Honmachi, Kawaguchi, Saitama 332-0012, Japan

• Akedo Jun

  \Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan

• Akiyama Yoshikazu

  R&D Center RICOH Co., Ltd., 16-1 Shinei, Tsuzuki, Yokohama 224-0035, Japan

抄録

The results of the direct deposition of lead zirconate titanate [Pb(Zr_0.52, Ti_0.48)O₃] (PZT) thick film on a Si-based structure are presented. The construction of a bottom electrode is very important for successful deposition. The actuation properties of PZT on the Si membrane were investigated. For a 6.2× 6.1 mm², 65-μm-thick Si membrane driven by a 4.7× 4.3 mm², 13-μm-thick PZT layer, the deflections, which were 1.5 μm upon applying 52 V at nonresonance frequency and 22 μm upon applying 8 V at resonance frequency, were measured.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 39 (9B), 5600-5603, 2000

  The Japan Society of Applied Physics

キーワード

• piezoelectric thin film
• aerosol deposition method
• lead zirconate titanate
• microactuator
• microdevice
• ultrafine particle

詳細情報

• CRID: 1390282681229857536
• NII論文ID: 110004055597
• NII論文ID: 30021820602
• NII論文ID: 130004527760
• NII論文ID: 210000047842
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.39.5600
• COI: 1:CAS:528:DC%2BD3cXnt1yht7s%3D
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 5535760
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5535760
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.39.5600
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.39.5600/pdf
• 本文言語コード: en
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可