Derivation of Film Characteristic Constants in Bamboo Line by Drift Velocity Measurement

• HASEGAWA Masataka

  Tohoku University

• SASAGAWA Kazuhiko

  Hirosaki University

• UNO Shigeo

  Hirosaki University

Bibliographic Information

Other Title

• ドリフト速度計測によるバンブー金属薄膜配線の物性定数の導出(OS24a ナノ・マイクロ構造の強度信頼性解析)

Journal

• The Proceedings of The Computational Mechanics Conference

  The Proceedings of The Computational Mechanics Conference 2004.17 (0), 805-806, 2004

  The Japan Society of Mechanical Engineers

Details

• CRID: 1390001205859012992
• NII Article ID: 110004070593
• DOI: 10.1299/jsmecmd.2004.17.805
• ISSN: 24242799
• Web Site: https://www.jstage.jst.go.jp/article/jsmecmd/2004.17/0/2004.17_805/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles