317 Nd:YAG高調波による窒化アルミニウムの微細穴加工特性(OS13 レーザ応用加工)

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  • Characteristics of Micro Drilling for Aluminum Nitride by Harmonics of Nd:YAG Laser

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Influence of wavelength and the kind of assist gas on machining characteristics of aluminum nitride using Q-switched Nd:YAG harmonics were experimentally investigated. Removal rate increases with the reduction of wavelength. Drilled depth increases proportionally with the number of laser shot at the beginning region of machining, while it stagnates after the proportional region. Drilled depth was greatly different by the kind of assist gas in the case of fundamental wavelength, while it was not influenced sensitively by the kind of assist gas in the case of harmonics because of its high photon energy. Debris was deposited remarkably except for fundamental wavelength, when blind hole is drilled using helium as the assist gas.

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