536 セラミックナノ粒子混合樹脂を用いた液晶マイクロ光造型法 : グレースケールの効果(OS7 ナノ・マイクロ加工)

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  • LCD micro stereolithography using ceramic nanoparticles reinforced photosensitive resin : Effect of grayscale on fabrication accuracy

抄録

Ceramic nanoparticles reinforced photosensitive resins are developed by the mixing ceramic nanoparticles (alumina-silica particles) into photosensitive resins uniformly to -produce micro stereolithography parts with high mechanical properties in this research. Micro Vickers hardness values are improved to 3.4 times than hardness values of photosensitive resins not reinforced due to reinforce the particles into the photosensitive resin at the mixing rate, 50wt%. Also, the continuous laminating micro stereolithography method using the grayscales at the LCD mask images is proposed in order to control surplus growth phenomena and to produce highly precise micro structures. Finally, micro bevel gears are fabricated by .the use of ceramic particles reinforced photosensitive resins.

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