Development of Highly Sensitive Force Sensor with Accurate Gap Control Using Double-Ended Tuning Fork
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- FUKUZAWA Kenji
- Department of Micro/Nano Systems Engineering, Nagoya University
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- ANDO Takamasa
- 科学技術振興機構さきがけ
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- SHIBAMOTO Masami
- Department of Micro/Nano Systems Engineering, Nagoya University
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- ZHANG Hedong
- 名古屋大学大学院情報科学研究科
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- MITSUYA Yasunaga
- Department of Micro/Nano Systems Engineering, Nagoya University
Bibliographic Information
- Other Title
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- 双音叉型共振器を用いた高精度隙間制御可能な高感度力センサ
- ソウオンサガタ キョウシンキ オ モチイタ コウセイド スキマ セイギョ カノウ ナ コウカンドチカラ センサ
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Abstract
A novel force sensor that can provide high sensitivity with accurate gap control has been presented. It combines a double-ended tuning fork (DETF) resonator with a rigid beam. When the force to be measured is applied to the rigid beam, the resonant frequency of the tuning fork changes due to the change of the tension. The DETF-based sensor can detect the force as the amplitude change corresponding to the resonant frequency change. The performance of the sensor was theoretically and experimentally investigated. The sensor can measure the force under the condition that the change of the probe-sample gap is less than 1 nm. The experimentally attained minimum detection limit of the force was 19.6 μ N and this can be improved by two orders of magnitude according to theoretical estimation. The DETF-based force sensor can be useful tool for various field such as development of micro/nano-machine, micro/nano-tribology, probe microscopy.
Journal
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- TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
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TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 72 (713), 125-131, 2006
The Japan Society of Mechanical Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390001206386869248
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- NII Article ID
- 130004235839
- 110004226471
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- NII Book ID
- AN00187463
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- ISSN
- 18848354
- 03875024
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- NDL BIB ID
- 7815532
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed