書誌事項
- タイトル別名
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- 712 Measurement of Elastic Constants of Thin Films by RUS/Laser Method and Micromechanics Modeling
抄録
We originally develop a measurement method for determining anisotropic elastic constants of thin films on substrates. It uses free-vibration resonance frequencies of a film/substrate rectangular parallelepiped specimen, which depend on dimensions, mass density and elastic constants of the film and substrate; film's elastic constants are inversely determined from the resonance frequencies. We measure the resonance frequencies with a high accuracy using a piezoelectric tripod transducer, consisting of needle-type transducers for generation and detection of vibration. Detected resonance peaks are identified by measuring the displacement distribution on the vibrating surface using laser-Doppler interferometer. We applied this method to copper and CVD diamond thin films. Their elastic constants show elastic anisotropy between the in-plane and out-of-plane directions. We attribute it to incohesive bonds at grain boundaries. This view is supported by micromechanics calculations.
収録刊行物
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- 関西支部講演会講演論文集
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関西支部講演会講演論文集 2004.79 (0), _7-23_-_7-24_, 2004
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282680826103296
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- NII論文ID
- 110004301375
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- ISSN
- 24242756
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可