Fabrication of Smart Material PZT Thin Films by RF Magnetron Sputtering Method in Micro Actuators

• TSUCHIYA Kazuyoshi

  Department of Precision Engineering, Tokai University

• KITAGAWA Toshiaki

  Department of Mechanical Engineering, Osaka Institute of Technology, Graduate School of Engineering

• UETSUJI Yasutomo

  Department of Mechanical Engineering, Osaka Institute of Technology

• NAKAMACHI Eiji

  Department of Mechanical Engineering, Osaka Institute of Technology

Abstract

PZT piezoelectric thin films can be promising candidates for microactuators or microsensors in MEMS (Micro Electro Mechanical Systems) or NEMS (Nano Electro Mechanical Systems) because of the quick response. In this research, the RF magnetron sputtering method is used for PZT thin films deposition. The sputtering conditions to control the crystalline plane (111) of perovskite structure for PZT to influence the piezoelectric constant can be proposed. Those sputtering conditions such as substrate angle and temperature, Ar/O₂ pressure and flow rate were investigated by the heuristic and experimental design method to fabricate optimum PZT perovskite crystal thin film. The condition of substrate temperature was the most important factor to improve piezoelectric constant. The crystalline structure, surface topography and piezoelectric constant of the deposited PZT were observed by X-ray diffraction structural analysis, atomic force microscope and piezoelectric constant evaluation equipment. PZT thin films with only perovskite structure were obtained. PZT (111) was grown with the increase in substrate temperature, and the piezoelectric property was improved. The elastic modulus of 70GPa for the deposited PZT found a good agreement with the quoted value for commercial based bulk PZT. We obtained a piezoelectric constant d₃₁=-28pm/V and a high performance of bimorph actuator.

Journal

• JSME International Journal Series A

  JSME International Journal Series A 49 (2), 201-208, 2006

  The Japan Society of Mechanical Engineers

Keywords

• PZT
• RF Magnetron Sputtering
• Ceramics
• Piezoelectric Actuator
• Material Design
• Micromechanics
• Optimum Design
• Experimental Design Method

Details

• CRID: 1390282681470617472
• NII Article ID: 110004683594
• NII Book ID: AA11179396
• DOI: 10.1299/jsmea.49.201
• COI: 1:CAS:528:DC%2BD28Xmt1Sns78%3D
• ISSN: 13475363
• ISSN: 13447912
• NDL BIB ID: 7882538
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7882538
• Web Site: http://www.jstage.jst.go.jp/article/jsmea/49/2/49_2_201/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed