Holographic Analysis of Incident Electron Beam Angular Distribution of Characteristic X-rays: Internal Detector Electron Holography

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Abstract

The incident electron beam angular distribution of Ti Kα characteristic X-rays from a strontium titanate single crystal was measured by scanning electron microscopy. The isotropy exhibits typical features observed in conventional photoelectron holography. Reconstructions by Fourier-transformation-based algorithm clearly show neighboring Sr and Ti atoms around Ti, the validity of which was verified by computer simulation. The demonstration paves the way to obtaining multiple energy holograms of nanostructured materials using the energy tunability of focused electron beams.

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