Active Control of Pneumatic Isolation Table with Spool Type Servo Valve and Quick Response Laminar Flow Sensor

• KATO Tomonori

  東京都立産業技術高等専門学校

• KAWASHIMA Kenji

  東京工業大学精密工学研究所

• SAWAMOTO Koichi

  東京工業大学大学院

• FUNAKI Tatsuya

  東京工業大学精密工学研究所

• KAGAWA Toshiharu

  東京工業大学精密工学研究所

Bibliographic Information

Other Title

• スプール型サーボ弁と層流型高速流量計を用いた空圧式アクティブ除振台の制御
• スプールガタ サーボベン ト ソウリュウガタ コウソク リュウリョウケイ オ モチイタ クウアツシキ アクティブジョシンダイ ノ セイギョ

Abstract

Pneumatic vibration isolation systems are widely used in semiconductor manufacturing. Most of them are controlled with nozzle flapper type pneumatic servo valves. However, such servo valves require a large amount of exhausted air flow rate in order to control pressure precisely.<br>In this paper, instead of using the nozzle flapper type servo valve, a pressure control system having a Quick Response Laminar Flow Sensor (QFS) and a spool type servo valve, is used to actively control a vibration isolation table. <br>A granite table is mounted on an air spring system, having a knife edge support in one end. The displacement motion of the table is modeled as a single degree of freedom, and experiments are carried out when the table is subjected to excitation. Steady state stability and dynamic response with respect to the excitation are evaluated. The derived results are more efficient than those obtained by using the nozzle flapper type servo valves. In particular, our investigation showed a 33% decrease of steady state exhausted air flow rate.

Journal

• Journal of the Japan Society for Precision Engineering, Contributed Papers

  Journal of the Japan Society for Precision Engineering, Contributed Papers 72 (6), 772-777, 2006

  The Japan Society for Precision Engineering

Keywords

• isolation table
• active control
• energy saving
• quick response laminar flow sensor
• spool type servo valve

Details

• CRID: 1390282680258881920
• NII Article ID: 110004729632
• NII Book ID: AA11966630
• DOI: 10.2493/jspe.72.772
• ISSN: 18818722
• ISSN: 13488716
• ISSN: 13488724
• ISSN: http://id.crossref.org/issn/13488724
• NDL BIB ID: 7984398
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7984398
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed