界面はく離を考慮した燃焼炎法によるＭｏ基板表面へのダイヤモンド皮膜合成

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タイトル別名
  • Synthesis of Diamond Film on Molybdenum Substrate Surface by Combustion Flame Considering the Delamination of the Interface
  • カイメン ハクリ オ コウリョ シタ ネンショウエンホウ ニ ヨル Mo キバン ヒョウメン エ ノ ダイヤモンド ヒマク ゴウセイ

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抄録

Diamond films were synthesized on a Mo substrate using combustion flame. During cooling process, the most diamond films delaminated between the diamond film and the Mo substrate. It was caused by the thermal stress due to a mismatch of the thermal expansion between the diamond film and the Mo substrate. In this study, a three-step synthesis method was proposed and prevented the film from the delamination. In the first step, the Mo 2 C and the diamond phases were synthesized on the Mo substrate, but the diamond phase was synthesized in the second and the third steps. The interfacial stress between the film and substrate was calculated by a finite element method. According to the results, the interfacial stress in the film made by the three-step synthesis method was smaller than that by the one-step synthesis method. The three-step method is useful for synthesizing the diamond film.

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