Fundamental Study on Multi-wire EDM Slicing for Monocrystalline Ingot : Effects of Supply Method of Working Fluid and Wire Speed on Machining Characteristics(Electrical machining)

• UNO Yoshiyuki

  Okayama University

• OKADA Akira

  Okayama University

• OKAMOTO Yasuhiro

  Okayama University

• SUZUKI Katsutomo

  Okayama University

• HIROTA So

  Okayama University

• HIRANO Tameyoshi

  Toyo Advanced Technologies Co., Ltd.

• TAKATA Shiro

  Makino Milling Machine Co., Ltd.

• ISHIKAWA Kazuhiko

  Makino Milling Machine Co., Ltd.

抄録

A new slicing method of monocrystalline silicon ingot using wire electrical discharge machining was proposed for high efficiency and high quality slicing instead of inner diameter blade or multi-wire method. The effects of supply method of working fluid and wire speed on machining characteristics were experimentally investigated. It is clarified that the immersion method is superior than the nozzle supply method and the wire speed over 200m/min is desirable for stable machining. Besides, mounting of wire sub-guide is useful for obtaining better kerf shape.

収録刊行物

• Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21

  Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005.2 (0), 783-786, 2005

  一般社団法人 日本機械学会

キーワード

• Multi-wire
• Electrical discharge machining
• Slicing
• Monocrystalline silicon

詳細情報

• CRID: 1390001205900828416
• NII論文ID: 110006185792
• DOI: 10.1299/jsmelem.2005.2.783
• ISSN: 24243086
• Web Site: https://www.jstage.jst.go.jp/article/jsmelem/2005.2/0/2005.2_783/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可