2408 走査型電子顕微鏡下におけるマイクロマニピュレーションシステムに関する研究(J22-2 材料特性計測とマイクロ機構,J22 マイクロメカトロニクス,2005年度年次大会)

DOI Web Site

書誌事項

タイトル別名
  • 2408 Study on The Micro Manipulation System in a Scanning Electron Microscope System

抄録

In this study we focus on diamond as a structural material for micromechanisms. Diamond is the hardest material on the earth, and has superior antifriction and anticorrosion characteristics. If diamond were applied to a micromechanism, an almost maintenance-free component which requires only a few component exchanges could be fabricated. We have already developed a diamond end effector for micromanipulators in air using light microscope, and have obtained several promising results. In this study, we added a positioning device to endure in low-medium vacuum using scanning electron microscope, and modified the design of the diamond end effector accordingly. Major modifications were examined through finite element analysis of fabricated shapes and amount of movement. In this study, first, a simulation using the finite element method was performed to analyze stress distribution on the designed end effector. Then, the end effector made of a thick diamond film was fabricated using a Qsw-YAG laser to evaluate the performance of the system. A shape-memory-alloy was used to obtain sufficient gripping force and flexibility of the operation.

収録刊行物

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ