01aB11 GaN/GaN(001)における成長初期過程の理論検討(半導体エピ(2),第36回結晶成長国内会議)

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  • 01aB11 Theoretical investigation of initial growth process of GaN on GaN(001)(NCCG-36)

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We carried out theoretical analyses based on the ab initio calculations incorporates free energy of vapor phase in order to find the initial growth process of cubic GaN in GaN(001)-(4x1). The results suggest that N attached structure appears at the initial growth stage, and then Ga adsorbs on the N attached GaN(001)-(4x1) surface. Considering these process, we performed Monte Carlo simulations. The results imply that maximum point of Ga coverage after 1/32 monolayer supply shifted toward Ga-rich condition from V/III=1.0.

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詳細情報 詳細情報について

  • CRID
    1390001205896759936
  • NII論文ID
    110006208475
  • NII書誌ID
    AN00188386
  • DOI
    10.19009/jjacg.33.4_207
  • ISSN
    21878366
    03856275
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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