カーボンナノチューブプローブを用いた pico-Newton 力計測のための曲げ剛性の同定  [in Japanese] Calibration of Bending Moduli of Carbon Nanotube Probes for pico-Newton Force Measurement  [in Japanese]

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Author(s)

Abstract

Force measurement method by using a carbon nanotube (CNT) probe with pico-Newton (pN) order resolution is presented. A CNT probe is constructed by attaching it to the tip of a tungsten needle probe or an atomic force microscope (AFM) cantilever by using nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). Electron-beam-induced deposition (EBID) is used for fixation of CNT probes. For manipulating them easily and quickly, CNTs are dispersed in enthanol by ultrasonic waves and oriented on copper electrodes by electrophoresis. The elastic moduli of CNT probes are calibrated by exciting the probes at the fundamental frequency by applied electric field, for force measurements. We analyzed the resolution of force measurement method using a CNT probe. This method can be used to measure the mechanical properties of nanostructures and friction or exfoliation forces in nanometer order.

Journal

  • Transactions of the Japan Society of Mechanical Engineers. Series C.

    Transactions of the Japan Society of Mechanical Engineers. Series C. 70(690), 427-432, 2004-02-25

    The Japan Society of Mechanical Engineers

References:  21

Cited by:  1

Codes

  • NII Article ID (NAID)
    110006263761
  • NII NACSIS-CAT ID (NCID)
    AN00187463
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    03875024
  • NDL Article ID
    6867092
  • NDL Source Classification
    ZN11(科学技術--機械工学・工業)
  • NDL Call No.
    Z16-1056
  • Data Source
    CJP  CJPref  NDL  NII-ELS 
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