走査型・透過型電子顕微鏡下でのハイブリッド型ナノロボットマニピュレーションシステムによるナノチューブの機械特性計測  [in Japanese] Measurement of a Bending Modulus of a Nanotube through Hybrid Nanorobotic Manipulation System inside SEM and TEM  [in Japanese]

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Author(s)

Abstract

In this paper, a hybrid nanorobotic manipulation system is presented. This manipulation system consists of a manipulator being able to work inside a scanning electron microscope (SEM), SEM nanorobotic manipulator, with a small manipulator being able to work inside a transmission electron microscope (TEM), TEM nanorobotic manipulator. The TEM nanorobotic manipulator consists of a 3-degree-of-freedom (DOF) manipulator actuated with 4 piezoelectric stacks and a 3-DOF passively driven translational sample stage. This stage is pre-manipulated with the SEM manipulator for sample preparations inside the SEM. The system enables high resolution manipulation inside the TEM by setting samples inside the SEM. The methodology is named as hybrid nanorobotic manipulation so as to differentiate it from those only with an exchangeable specimen holder. To show the effectiveness of the system, the elastic modulus of a carbon nanotube (CNT) was measured to be 1.23 TPa inside the TEM after being pre-manipulated inside the SEM. With this system, we can measure the inner diameter of a CNT and improve the accuracy in measuring the elastic modulus of a CNT.

Journal

  • Transactions of the Japan Society of Mechanical Engineers. Series C.

    Transactions of the Japan Society of Mechanical Engineers. Series C. 71(704), 1349-1354, 2005-04-25

    The Japan Society of Mechanical Engineers

References:  14

Cited by:  1

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    References (8)

Codes

  • NII Article ID (NAID)
    110006264673
  • NII NACSIS-CAT ID (NCID)
    AN00187463
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    03875024
  • NDL Article ID
    7338939
  • NDL Source Classification
    ZN11(科学技術--機械工学・工業)
  • NDL Call No.
    Z16-1056
  • Data Source
    CJP  CJPref  NDL  NII-ELS 
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