Probe-oxidation-based Nanofabrication of Solid Surface

• FUKUZAWA Kenji

  Department of Micro/Nano Systems Engineering, Nagoya University

• DEGUCHI Takanori

  Department of Micro/Nano Systems Engineering, Nagoya University

• MURAMATSU Takuro

  名古屋大学工学部

• ZHANG Hedong

  名古屋大学大学院情報科学研究科

• MITSUYA Yasunaga

  Department of Micro/Nano Systems Engineering, Nagoya University

Bibliographic Information

Other Title

• プローブ陽極酸化を用いた表面ナノ構造の作製
• プローブ ヨウキョク サンカ オ モチイタ ヒョウメン ナノ コウゾウ ノ サクセイ

Abstract

Probe oxidation-based surface-nanofabrication has been presented. Electrochemically generated oxide nano ridge structure can be fabricated using probes for atomic force microscopy. Moreover, removing the oxide ridge by hydrofluoric acid etching, nano groove structures can also be obtained. The relationship between the shape of nanostructures and fabrication conditions such as applied voltage and radius of curvature of the probe was studied. Finally, nano structures with very small height or depth (several tens-nm wide and sub-nm high or deep) have been fabricated by our method. This is very useful for clarifying nanotribology of micro or nanomechanical devices.

Journal

• TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

  TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 71 (710), 3061-3066, 2005

  The Japan Society of Mechanical Engineers

Keywords

• Nano-fabrication
• Probe Oxidation
• Micro-nanotribology
• Atomic Force Microscope
• Head Disk Interface

Details

• CRID: 1390001206386306688
• NII Article ID: 110006264903
• NII Article ID: 130004084749
• NII Book ID: AN00187463
• DOI: 10.1299/kikaic.71.3061
• COI: 1:CAS:528:DC%2BD2MXhtlCmt7%2FF
• ISSN: 18848354
• ISSN: 03875024
• NDL BIB ID: 7689486
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7689486
• Web Site: http://www.jstage.jst.go.jp/article/kikaic1979/71/710/71_710_3061/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed