Crack Length Measurement with an Ion Sputtered Metal Film

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  • 一枚型イオンスパッタ金属膜によるき裂長さの測定
  • イチマイガタ イオンスパッタ キンゾク マク ニ ヨル キレツ ナガサ ノ ソクテイ

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Abstract

This research developed a simple and high precision method to measure the length of a fatigue crack using an extremely thin ion sputtered metal film based on that the electric resistance of the film changes with the increase of the crack. The electric resistance of a cracked film was calculated by the electrothermal FEM analysis. Based on the FEM analysis results, the relationship between the electric resistance and crack length is expressed by a practical formula. Fatigue crack length measurements for acrylic and metal test specimens were performed on the three-points fatigue test equipment. Based on the good agreements between the measurement results by the ion sputtered film and that by the optical microscope, it is clarified that the crack length measurement method with an ion sputtered metal film has a very high precision. In addition that the measurement system is very simple, this method can be said to have a high practical usability.

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