Strong Ultraviolet and Green Emissions at Room Temperature from Annealed ZnO Thin Films.

  • Agyeman Onwona
    National Institute of Advanced Industrial Science and Technology, Kyushu, Tosu, Saga 841-0052, Japan Department of Physics, Saga University, Saga 840-8502, Japan
  • Xu Chao-Nan
    National Institute of Advanced Industrial Science and Technology, Kyushu, Tosu, Saga 841-0052, Japan
  • Shi Wensheng
    National Institute of Advanced Industrial Science and Technology, Kyushu, Tosu, Saga 841-0052, Japan
  • Zheng Xu-Guan
    Department of Physics, Saga University, Saga 840-8502, Japan
  • Suzuki Morio
    Department of Physics, Saga University, Saga 840-8502, Japan

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Undoped ZnO thin films were grown by rf magnetron sputtering on quartz-glass substrates and thermally annealed under various conditions such as in vacuum, reducing gas (5% H2 diluted in Ar), oxygen and argon ambient, up to 1100°C. We observed a strong excitonic (UV) emission peak around 3.26 eV, when the films were annealed in the reducing ambient whilst the films annealed in argon and oxygen showed strong deep-level emission peaks. The dependence of the UV and visible emissions on the film crystallinity and annealing is discussed.

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