Development of New Preparation System for Highly Sensitive Flammable Gas Sensor.

• Kawasaki Hiroharu

  Department of Electrical Engineering, Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan

• Namba Jun

  Department of Electrical Engineering, Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan

• Iwatsuji Keitarou

  Department of Electrical Engineering, Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan

• Suda Yoshiaki

  Department of Electrical Engineering, Sasebo National College of Technology, 1-1 Okishin, Sasebo, Nagasaki 857-1193, Japan

Abstract

A new deposition system for preparing a highly sensitive flammable gas sensor has been developed. In this method, tin oxide (SnO₂) thin films were deposited on Si(100) and Al₂O₃ substrates using the pulsed Nd:YAG (532 nm) laser deposition (PLD) method and palladium (Pd) thin films were deposited on the same substrate using d.c. sputtering simultaneously. Experimental results suggest that Pd-doped SnO₂ thin films can be prepared using this new method. The sensitivity of the Pd-doped SnO₂ film sensor prepared using this new deposition system is about 3.2 times higher than that of a pure SnO₂ film sensor prepared by the conventional PLD method.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 41 (8), 5390-5391, 2002

  The Japan Society of Applied Physics

Keywords

• tin oxide
• SnO<FONT SIZE="-1"><SUB>2</SUB></FONT>
• gas sensor
• pulsed laser deposition
• thin films
• sputtering

Details

• CRID: 1390282681231505024
• NII Article ID: 110006341742
• NII Article ID: 130004530022
• NII Article ID: 210000051931
• NII Book ID: AA10457675
• DOI: 10.1143/jjap.41.5390
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/41/i=8R/a=5390/pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed