Fabrication of Micropatterns on Sapphire Substrates via Room-Temperature Selective Homoepitaxial Growth Induced by Electron Beam Irradiation.
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- Sasaki Atsushi
- Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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- Isa Hiroshi
- Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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- Liu Jin
- Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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- Akiba Shusaku
- Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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- Hanada Teiichi
- Graduate School of Human and Environmental Studies, Kyoto University, Yoshida, Sakyo-ku, Kyoto 606-8501, Japan
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- Yoshimoto Mamoru
- Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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抄録
The surface microstructure of sapphire (α-Al2O3) substrates could be constructed at room temperature via selective sapphire homoepitaxial growth induced by electron beam irradiation in laser molecular beam epitaxy. The films grew homoepitaxially on sapphire (10¯12) substrates at room temperature only in the region electron-irradiated during film deposition, while amorphous aluminum oxide films grew in the non-irradiated area. The surface micropatterns on sapphire substrates were easily obtained by the selective H3PO4 wet etching of the modified sapphire surface coated with crystalline and amorphous film. The microwall and microgroove could be fabricated on the sapphire substrates at room temperature.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 41 (11A), 6534-6535, 2002
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206257459456
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- NII論文ID
- 210000052192
- 110006341978
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可