2-3 Formation of High Function Ceramic Surface by Ion Implantation(Session 2 : Surface Modification,SIMAP'88 Proceedings of International Symposium on Strategy of Innovation in Materials Processing-New Challenge for the 21st Century-)
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SiC is a candidate material for advanced turbine engine component. It has superior characteristics such as higher hardness and elastic modulus than that of Si_3N_4. On the contrary, Si_3N_4 has better properties such as higher fracture toughness, oxidation-, and thermal shock-resistances. ^1If SiC-Si_3N_4 composite material can be made by using ion implantation technique, it can be served for multiple object. In this report, nitrogen ion was implanted into SiC and the chemical state of nitrogen as implanted and after heattreated was studied with XPS. The distribution of nitrogen implanted was measured with SIMS and RBS. The results were compared with the one by LSS theory.
- Transactions of JWRI
Transactions of JWRI 17(1), 85-92, 1988-05