Mechanical Properties of DLC Coatings Prepared on PPS by RF Plasma CVD

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  • RFプラズマCVD法を用いてPPS上に形成したDLC膜の機械的特性
  • RFプラズマCVDホウ オ モチイテ PPSジョウ ニ ケイセイ シタ DLCマク ノ キカイテキ トクセイ

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Abstract

In this paper, we report DLC coatings prepared on PPS (polyphenylene sulfide) substrate by RF plasma CVD technique. The substrate surface roughness was controlled to approximately Ra 0.1μm and four types of specimen were prepared under different RF power, from 100W to 400W. The coating thickness was controlled to 2.0μm. Structures and surface properties of the coatings were evaluated by raman spectroscopy, surface roughness test, surface observation using SEM, hardness test, and scratch test. Friction/wear properties were evaluated by ball-on-disk tribometer. SUS304, SUJ2, ZrO2 and Si3N4 ball were used as sliding partner of the friction test. After the friction test, friction coefficient and specific wear rate of each specimen were calculated. Surface roughness Ra decreased with RF power to 300W, however Ra of RF 400W DLC was higher than that of RF 300W because of number of cracks on RF 400W DLC. Dynamic hardness increased with RF power. Adhesiveness of RF 300W DLC was the best, however strength of adhesion seemed to be better than RF 300W DLC. Specific wear rates of RF300W and 400W DLC were found to be small in spite of ball material of sliding partner.

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