A122 ナノスケール熱物性値計測のための近接場光サーモリフレクタンス信号の高感度検出(マイクロ・ナノスケール2)

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  • A122 High Sensitive Detection of Near-field Optical Thermoreflectance Signal for Measurement of Thermophysical Properties in Nanoscale

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In conventional optical measurement technique of thermophysical properties, the spatial resolution is limited by the diffraction limit of light, which is approximately half of the wavelength of the optical beam. Therefore, we have developed near-field optics thermal nanoscopy (NOTN), which is a thermal properties sensing technique (i.e. thermal conductivity and thermal diffusivity) using near-field light. This method has nanoscale spatial resolution (up to 10nm). Also, NOTN enables noncontact and in situ measurement of nanoscale devices and materials. In this paper, the detection of the near-field light with 100nm aperture fiber probe was demonstrated. Also, the evaluation of spatial resolution with 100nm aperture fiber probe was discussed.

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