Crystal Morphology Analysis of Piezoelectric Ceramics by Electron BackScatter Diffraction Method and Application to Multiscale Finite Element Analysis

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  • 電子線後方散乱法による圧電セラミックスの結晶形態分析とそれを用いたマルチスケール有限要素解析
  • デンシセン コウホウ サンランホウ ニ ヨル アツデン セラミックス ノ ケッショウ ケイタイ ブンセキ ト ソレ オ モチイタ マルチスケール ユウゲン ヨウソ カイセキ

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Abstract

Micro crystal morphology, which affects strongly on macro electromechanical response of polycrystalline piezoelectric ceramics, was analyzed by electron backscatter diffraction method. We coated piezoelectric ceramics with amorphous osmium to defend against electrification caused by electron beam, and measured crystal orientations of 140×120μm2 over region with 0.32μm interval points. Then the obtained crystal orientations were applied to a multiscale finite element analysis to estimate the relation with macro homogenized properties. Especially, we investigated on finite element modeling conditions for crystal orientations, and presented a representative volume element of microstructure to compute macro and micro responses.

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