Study on Nano-Machining of Hard and Brittle Material with Focused Ion Beam

• TAKAHASHI Nobuhiko

  東京工業大学大学院

• YOSHIOKA Hayato

  東京工業大学精密工学研究所

• SHINNO Hidenori

  東京工業大学精密工学研究所

Bibliographic Information

Other Title

• 集束イオンビームによる硬ぜい性材料のナノ加工に関する研究
• シュウソク イオン ビーム ニ ヨル コウゼイセイ ザイリョウ ノ ナノ カコウ ニ カンスル ケンキュウ

Abstract

Fine and precise machining are required in various industrial sectors. The tool with high durability and reliability for such machine process is almost made of hard and brittle materials, and it is generally unmachinable. The focused ion beam (FIB) machining is one of the most promising nano-machining technologies for machining of hard and brittle material. In this study, surface hardness and surface roughness of hard and brittle material after machining with FIB are discussed. Covariance structure modeling of the nano-machining process with FIB results in connections between machining conditions and irradiated material characteristics. The results show that the increasing beam diameter prevents the decrease of surface hardness and the increase of surface roughness after the machining with FIB.

Journal

• Journal of the Japan Society for Precision Engineering

  Journal of the Japan Society for Precision Engineering 74 (5), 491-497, 2008

  The Japan Society for Precision Engineering

Keywords

• focused ion beam
• nano-machining
• covariance structure analysis
• hard and brittle material
• sputtering

Details

• CRID: 1390282679774262400
• NII Article ID: 110006668362
• NII Book ID: AN1003250X
• DOI: 10.2493/jjspe.74.491
• ISSN: 1882675X
• ISSN: 09120289
• NDL BIB ID: 9506118
• Web Site: http://id.ndl.go.jp/bib/9506118
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9506118
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed