オートコリメーション方式深穴形状精度測定システムの開発（第２報）

• 村上 洋

  福岡県工業技術センター，機械電子研究所

• 甲木 昭雄

  九州大学

• 鬼鞍 宏猷

  九州大学

• 佐島 隆生

  九州大学

書誌事項

タイトル別名

• Development of a Deep-Hole Measuring System by Using Autocollimation Principle (2nd Report)
• オートコリメーション ホウシキ フカアナ ケイジョウ セイド ソクテイ システム ノ カイハツ ダイ2ホウ ソウチ ノ シサク オヨビ ヒョウカ ジッケン
• - Evaluation of a Fabricated Apparatus and Evaluative Experiments -
• －装置の試作および評価実験－

抄録

The measuring system for evaluating the accuracy of a deep hole is developed by using the autocollimation principle. The system consists of a measuring unit and an optical system for light reception. The measuring unit comprises one laser diode, two mirrors, two quarter-wave plates, one polarizing beam splitter, and a feeler. The system detects the displacement of a feeler on the basis of the autocollimation principle. The optical system for light reception, which receives the laser beam irradiated from the laser diode in the measuring unit, comprises a plano-convex lens and a CCD camera. In this research, the measuring unit is manufactured for trial and its measuring accuracies are examined by using the basic experimental apparatus. As a result, the followings are clarified. The optimum values of the CCD image processing parameters are 60 in threshold and 250μs in exposure. The error of measurement by using the measuring unit is ±0.26 μm. Measurement error of its rotational angle is ±0.01°.

収録刊行物

• 精密工学会誌

  精密工学会誌 74 (5), 504-508, 2008

  公益社団法人 精密工学会

キーワード

• deep hole
• measurement
• autocollimation principle
• laser diode
• roundness
• cylindricity
• straightness

詳細情報

• CRID: 1390001204797545216
• NII論文ID: 110006668364
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.74.504
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 9506148
• Web Site: http://id.ndl.go.jp/bib/9506148
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9506148
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