Large area optical devices with glass-pressed/metal-embedded sub-wavelength grating

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Through our studies, we developed processes to reproduce micro-features to large areas and to embed metal to the grooves. We designed and produced a mold for glass pressing. The mold was 12 x 12mm and had micro-grooves with a minimum width of 170nm and a minimum pitch of 340nm. The mold was made of bulk CVD-SiC and Fast Atom Beam (FAB) produced the micro-features. We determined the optimum press parameters for glass pressing with our mold, and we showed that the filling rate of pressing is approximately linear to the logarithm of time. We also developed processes to produce metal embedded subwavelength gratings by sputtering a metal film on a glass substrate with micro-features, spin-coating resin to flatten the surface, and dry etching it with FAB. We further evaluated the polarization device and found it had 0.9 degree of polarization to a light of wavelength 650nm. We confirmed the results by comparing the measured results with numerical analysis. For further enhancing the optical performance of the device, we need to optimize the grating cross-sectional shape and improve the precision of reproduction.

収録刊行物

  • 生産研究

    生産研究 59 (6), 522-525, 2007

    東京大学生産技術研究所

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