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- TSUCHIYA Kensuke
- Institute of Industrial Science University of Tokyo
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- KOMIYA Atsuto
- School of Engineering the University of Tokyo
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- SUZUKI Hideaki
- School of Engineering the University of Tokyo
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- OOI Takeshi
- School of Engineering the University of Tokyo
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- MORII Hiroshi
- School of Engineering the University of Tokyo
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- HAMAGUCHI Tetsuya
- School of Engineering the University of Tokyo
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- NAKAO Masayuki
- School of Engineering the University of Tokyo
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Abstract
Through our studies, we developed processes to reproduce micro-features to large areas and to embed metal to the grooves. We designed and produced a mold for glass pressing. The mold was 12 x 12mm and had micro-grooves with a minimum width of 170nm and a minimum pitch of 340nm. The mold was made of bulk CVD-SiC and Fast Atom Beam (FAB) produced the micro-features. We determined the optimum press parameters for glass pressing with our mold, and we showed that the filling rate of pressing is approximately linear to the logarithm of time. We also developed processes to produce metal embedded subwavelength gratings by sputtering a metal film on a glass substrate with micro-features, spin-coating resin to flatten the surface, and dry etching it with FAB. We further evaluated the polarization device and found it had 0.9 degree of polarization to a light of wavelength 650nm. We confirmed the results by comparing the measured results with numerical analysis. For further enhancing the optical performance of the device, we need to optimize the grating cross-sectional shape and improve the precision of reproduction.
Journal
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- SEISAN KENKYU
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SEISAN KENKYU 59 (6), 522-525, 2007
Institute of Industrial Science The University of Tokyo
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Details 詳細情報について
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- CRID
- 1390282679039622656
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- NII Article ID
- 110006936095
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- NII Book ID
- AN00127075
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- COI
- 1:CAS:528:DC%2BD2sXhtlais7jP
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- ISSN
- 18812058
- 0037105X
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- NDL BIB ID
- 9259839
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- CiNii Articles
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- Abstract License Flag
- Disallowed