マシニングセンタ型ナノ加工・計測システムの開発に関する研究  [in Japanese] Study for Development of Nano-Machining and Measurement System of Machining Center Type  [in Japanese]

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Author(s)

Abstract

A small precision nanomachining and measurement system was developed with a targeted machining resolution on the order of scales ranging from submicrons to several nanometers. The system was comprised of two machining functions, scratch machining and milling, and one measurement function. The scratch machining function was based on a frictional force microscope mechanism with a closed-loop numerical control (NC) to control the depth of the cut. A stiff cantilever was used for the scratch-machining function to permit nanomachining of hard and brittle materials such as silicon. The milling function used an original miniature tool that had a very small diamond mounted on it that permitted micromachining. The measurement function incorporated into this system used the same mechanism as the scratch-machining function, and provided a degree of precision almost equal to that of atomic force microscopy. After constructing this system, we performed various machining tests with it to confirm that the integrated NC closed-loop control function performed correctly.

Journal

  • Journal of the Japan Society for Precision Engineering

    Journal of the Japan Society for Precision Engineering 74(11), 1176-1181, 2008-11-05

    The Japan Society for Precision Engineering

References:  18

Cited by:  1

  • Mold  [in Japanese]

    横澤 毅

    塑性と加工 50(583), 757-759, 2009-08-25

    References (73) Cited by (1)

Codes

  • NII Article ID (NAID)
    110006990556
  • NII NACSIS-CAT ID (NCID)
    AN1003250X
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    09120289
  • NDL Article ID
    9710903
  • NDL Source Classification
    ZN12(科学技術--機械工学・工業--精密機械)
  • NDL Call No.
    Z16-466
  • Data Source
    CJP  CJPref  NDL  NII-ELS  J-STAGE 
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