2607 ピコ秒レーザー超音波法によるナノ薄膜の弾性定数測定と健全性評価(S22-2 非破壊評価とモニタリング(2),S22 非破壊評価とモニタリング)

• 舎川 知広

  阪大

• 藤井 誠

  旭硝子

• 中村 暢伴

  阪大

• 荻 博次

  阪大

• 平尾 雅彦

  阪大

書誌事項

タイトル別名

• 2607 Elastic constant and reliability evaluation of ultrathin films studied by picosecond laser ultrasounds

抄録

We measured the out-of-plane elastic constant C_<33> of Co and Pt ultrathin films. The films were prepared on the Si and glass substrates by rf magnetron sputtering with and without heat treatment. The film thickness was about 5〜80nm. The elastic constant was measured by picosecond-laser-ultrasounds technique. The elastic constant of Pt thin films was slightly smaller than that of the Pt bulk, while that of Co thin films depended on the substrate, despite the fact that XRD spectrum and SEM images showed little differences among specimens. These results indicate that the elastic constant can evaluate the reliability of thin films.

収録刊行物

• 年次大会講演論文集

  年次大会講演論文集 2007.1 (0), 527-528, 2007

  一般社団法人 日本機械学会

キーワード

• Elastic Constant
• Thin Film
• Picosecond Laser Ultrasounds

詳細情報

• CRID: 1390001206064999424
• NII論文ID: 110007085900
• DOI: 10.1299/jsmemecjo.2007.1.0_527
• ISSN: 24331325
• Web Site: https://www.jstage.jst.go.jp/article/jsmemecjo/2007.1/0/2007.1_527/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可