2002 レーザー励振音響フォノン共鳴法の開発と銅ナノ薄膜の弾性定数測定(G03-1 測定・検出・評価技術(1),G03 材料力学)

DOI Web Site

書誌事項

タイトル別名
  • 2002 Measurement of elastic constants of ultrathin Cu films by laser acoustic-phonon resonance spectroscopy

抄録

We developed the laser acoustic-phonon resonance spectroscopy for measuring the elastic modulus of ultrathin films. This method determines the out-of-plane elastic modulus by measuring the resonance frequency of acoustic phonons in thin films using the ultrashort-pulse laser, which allow us to determine the elastic modulus of thin films thinner than 100nm. In this study, we applied this method to Cu thin film deposited on Si substrates, and we found that epitaxially grown Cu thin films showed extremely stable elasticity: the out-of-plane elastic constant C_<33> was independent of the film thickness in the thickness range of 19-100nm and it was hardly affected by the annealing, despite the observation that the Cu thin film was highly strained due to the lattice mismatch with the substrate.

収録刊行物

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ