21pTG-11 An ordered SiON unltrathin film epitaxially grown on an SiC(0001) surface

• Shirasawa T.

  Department of Molecular and Material Sciences, Kyushu University

• Hayashi K.

  Department of Molecular and Material Sciences, Kyushu University

• Mizuno S.

  Department of Molecular and Material Sciences, Kyushu University

• Tanaka S.

  Department of Applied Quantum Physics and Nuclear Engineering, Kyushu University

• Tochihara H.

  Department of Molecular and Material Sciences, Kyushu University

Bibliographic Information

Other Title

• 21pTG-11 SiC(0001)上にエピタキシャル成長した秩序SiON超薄膜(表面界面構造,領域9,表面・界面,結晶成長)

Journal

• Meeting Abstracts of the Physical Society of Japan

  Meeting Abstracts of the Physical Society of Japan 62.1.4 (0), 926-, 2007

  The Physical Society of Japan

Details

• CRID: 1390001206011472128
• NII Article ID: 110007192278
• DOI: 10.11316/jpsgaiyo.62.1.4.0_926_4
• ISSN: 21890803
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles